IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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IEEE Trans Ultrason Ferroelectr Freq Control · Jan 1998
Analysis and optimization of Love wave liquid sensors.
Love wave sensors are highly sensitive microacoustic devices, which are well suited for liquid sensing applications thanks to the shear polarization of the wave. The sensing mechanism thereby relies on the mechanical (or acoustic) interaction of the device with the liquid. ⋯ We present analysis methods, which illustrate the impact of the interaction and which help to obtain an optimized design of the proposed shield. We also present experimental results for devices that have been fabricated according to these design rules.