IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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IEEE Trans Ultrason Ferroelectr Freq Control · Mar 2002
Synthesis and surface acoustic wave properties of AlN films deposited on LiNbO3 substrates.
The c-axis-oriented aluminum nitride (AIN) films were deposited on z-cut lithium niobate (LiNbO3) substrates by reactive RF magnetron sputtering. The crystalline orientation of the AIN film determined by x-ray diffraction (XRD) was found to be dependent on the deposition conditions such as substrate temperature, N2 concentration, and sputtering pressure. ⋯ The phase velocity and the electromechanical coupling coefficient (K2) of SAW were measured to be about 4200 m/s and 1.5%, respectively. The temperature coefficient of frequency (TCF) of SAW was calculated to be about -66 ppm/ degrees C.