IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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IEEE Trans Ultrason Ferroelectr Freq Control · Apr 2007
High-frequency surface acoustic waves excited on thin-oriented LiNbO3 single-crystal layers transferred onto silicon.
The need for high-frequency, wide-band filters has instigated many developments based on combining thin piezoelectric films and high acoustic velocity materials (sapphire, diamond-like carbon, silicon, etc.) to ease the manufacture of devices operating above 2 GHz. In the present work, a technological process has been developed to achieve thin-oriented, single-crystal lithium niobate (LiNbO3) layers deposited on (100) silicon wafers for the fabrication of radio-frequency (RF) surface acoustic wave (SAW) devices. ⋯ Technological aspects then are described briefly. Experimental results are presented and compared to the state of art.