IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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IEEE Trans Ultrason Ferroelectr Freq Control · Mar 2002
Synthesis and surface acoustic wave properties of AlN films deposited on LiNbO3 substrates.
The c-axis-oriented aluminum nitride (AIN) films were deposited on z-cut lithium niobate (LiNbO3) substrates by reactive RF magnetron sputtering. The crystalline orientation of the AIN film determined by x-ray diffraction (XRD) was found to be dependent on the deposition conditions such as substrate temperature, N2 concentration, and sputtering pressure. ⋯ The phase velocity and the electromechanical coupling coefficient (K2) of SAW were measured to be about 4200 m/s and 1.5%, respectively. The temperature coefficient of frequency (TCF) of SAW was calculated to be about -66 ppm/ degrees C.
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IEEE Trans Ultrason Ferroelectr Freq Control · Jan 1998
Analysis and optimization of Love wave liquid sensors.
Love wave sensors are highly sensitive microacoustic devices, which are well suited for liquid sensing applications thanks to the shear polarization of the wave. The sensing mechanism thereby relies on the mechanical (or acoustic) interaction of the device with the liquid. ⋯ We present analysis methods, which illustrate the impact of the interaction and which help to obtain an optimized design of the proposed shield. We also present experimental results for devices that have been fabricated according to these design rules.